Compact MFC Unit・Mass Flow Controller・Mass Flow Meter/FCON CO., LTD.

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Compact Flow Control Unit



● Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
● It can be used by connecting the gas fitting and power outlet.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal : Analog (0~5VDC).
● Equipped with monitor terminal for setting / output voltage on the back.
● This product is ideal for use on the desktop, space saving.
● If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
newUpon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
new1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Please contact us for details such as available gas types and flow rates.
newLineup of normally closed type (C1005NC to C1050NC).

Product Catalog
CUBEMFC Series Catalog
◀ [CUBE MFC Series] Catalog Download.
Conpact Flow Control Unit N.O CUBE MFC 1005/1020/1030/1050/1100
Conpact Flow Control Unit N.C [NEW] CUBE MFC 1005NC/1020NC/1030NC/1050NC
Conpact Flow Meter Unit CUBE MFM 1005/1020/1030/1050/1100
Mass Flow Controller/Meter 1000 series
Gas species Depends on MFC selected
Flow range (N2equivalent) 10SCCM~100SLM
Gases Various Gases (Please consult about corrosive gas)
Valve type NO : Normally Open, newNC : Normally Close(Excluding Mass Flow Meter)
Flow rate control range 5~100% F.S.(Excluding Mass Flow Meter)
Accuracy ±2% F.S [※±1% F.S Compatible] (Accuracy guaranteed between 15-35℃) ※Please contact us for details.
Setting signal 0.25~5VDC (Excluding Mass Flow Meter)
Output signal 0~5VDC / Display : Scaling display (Setting signals and output signals can be displayed by switching the switches.)
Repeatability ±0.2% F.S
Response Depends on MFC selected.
Operating differential pressure Depends on MFC selected.
Pressure resistance 1MPa(G)
Operating temperature 5-50℃(Accuracy guaranteedbetween 15~35℃), ≦85%RH(No condensation permitted)
Leak integrity 1×10-7Pa・m3/sec He
Drive power source 100-240VAC : ≦500mA
Communication Analog : 0~5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal (Excluding Mass Flow Meter)
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings,  ※ For other fitting, please contact us.
Accessory Power cord, User's manual, Written guarantee

External Dimensions
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