Compact MFC Unit・Mass Flow Controller・Mass Flow Meter/FCON CO., LTD.

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Compact Flow Control Unit



● Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
● It can be used by connecting the gas fitting and power outlet.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal : Analog (0~5VDC).
● Equipped with monitor terminal for setting / output voltage on the back.
● This product is ideal for use on the desktop, space saving.
● If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.

Product Catalog
CUBEMFC Series Catalog
◀ [CUBE MFC Series] Catalog Download.
Conpact Flow Control Unit CUBE MFC 1005
Flow range (N2equivalent) 10,20,30,50,100,200,300,500SCCM
Gases Various Gases (Please consult about corrosive gas)
Valve type NO : Normally Open
Flow rate control range 5~100% F.S.
Accuracy ±2% F.S (Accuracy guaranteed between 15-35℃)
Setting signal 0.25~5VDC
Output signal 0~5VDC / Display : Scaling display (Setting signals and output signals can be displayed by switching the switches.)
Repeatability ±0.2% F.S
Response ≦6sec
Operating differential pressure 50~300KPa
Pressure resistance 1MPa(G)
Operating temperature 5-50℃, ≦85%RH
Leak integrity 1×10-7Pa・m3/sec He
Drive power source 85-260VAC : ≦500mA
Communication Analog : 0~5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings,  ※ For other fitting, please contact us.
Accessory Power cord, User's manual, Written guarantee

External Dimensions
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