● RoHS/CE mark compatible. |
Mass Flow Controller | C2005 | C2020 | ||
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Mass Flow Meter | M2005 | M2020 | ||
Flow range (N2equivalent) | 10,20,30,50,100,200,300,500SCCM 1,2,3,5SLM |
10SLM | 20SLM | |
Gases | Various Gases (Please consult about corrosive gas) | |||
Valve type | NC : Normally Close (Excluding Mass Flow Meter) | |||
Flow rate control range | 2-100% F.S (Excluding Mass Flow Meter) | |||
Accuracy | ±1% F.S (Accuracy guaranteed between 15-35℃) | |||
Setting signal | Setting section of main unit, Digital: RS485, Analog: 0-5V and 4.3-20mA can be switched (Excluding Mass Flow Meter) |
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Output signal | Main unit display: 7 segment LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched | |||
Repeatability | ±0.2% F.S | |||
Response | ≦2sec | |||
Operating differential pressure | 50-300KPa | 100-300KPa | 200-300KPa | |
Pressure resistance | 1MPa(G) | |||
Operating temperature | 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃) | |||
Leak integrity | 1×10-7Pa・m3/sec He | |||
Mounting attitude | Free | |||
Drive power source | +24VDC: ≧500mA | |||
Communication | RS485, Analog: 0-5V and 4-20mA can be switched | |||
Wetted surface material | SUS316, PTFE, Fluoro-Rubber | |||
Seal material | Fluoro-Rubber | |||
Actuator system | Solenoid (excluding Mass Flow Meter) | |||
Surface treatment | Machined finish | |||
Standard fitting | 1/4in.SWL (equivalent), One-touch fittings, ※ For other fitting, please contact us. | |||
Accessory | User's manual, Written guarantee |
The following can be produced and provided for signal cables and AC adapters for drive power. ● Digital communication cable: (RJ11)-(RJ11) (Please contact us for recommended products.) ● Analog communication cable: (Half pitch 20-pin connector)-(Terminal treatment) (Please contact us for recommended products.) ● AC power supply adapter: +24 VDC (DC 22.8 to 25.2 V, 500 mA or more) ● Digital communication cable for main unit and PC connection (RJ11)-(converter)-(USB) and application software. |