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Mass Flow Controller

1000 Series

1000 Series

● It is an analog model specializing the basic functions of the mass flow controller.
● Improved performance and reliability by basic functions pursuing original technology.
● Two type of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
● Compact size.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal : Analog (0~5VDC)
● To control the mass flow controller, a control power supply and a signal cable are required.
newUpon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
new1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Please contact us for details such as available gas types and flow rates.
newLineup of normally closed type (C1005NC to C1050NC).

Product Catalog
1000 Series Catalog
◀ [1000 Series] Catalog Download.
Mass Flow Controller N.O C1005 C1020 C1030/C1050 C1100
Mass Flow Controller N.C [NEW] C1005NC [NEW] C1020NC [NEW] C1030NC/C1050NC -
Mass Flow Meter M1005 M1020 M1030/M1050 -
Flow range (N2equivalent) 10,20,30,50,100,200,300,500SCCM
10,20SLM 30,50SLM 100SLM
Gases Various Gases (Please consult about corrosive gas) Air, N2, Ar, H2, CO2, O2, He Air, N2
Valve type NO : Normally Open, newNC : Normally Close (Excluding Mass Flow Meter)
Flow rate control range 5-100% F.S (Excluding Mass Flow Meter)
Accuracy ±2% F.S [※±1% F.S Compatible] (Accuracy guaranteed between 15-35℃) ※Please contact us for details.
Setting signal 0.25-5VDC (excluding Mass Flow Meter)
Output signal 0-5VDC
Repeatability ±0.2% F.S ±0.5% F.S
Response ≦6sec ≦10sec ≦15sec
Operating differential pressure 50-300KPa 200-300KPa
Pressure resistance 1MPa(G)
Operating temperature 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity 1×10-7Pa・m3/sec He
Mounting attitude Free
Drive power source +15VDC:60mA、-15VDC:150mA
Communication Analog : 0-5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal (excluding Mass Flow Meter)
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings,  ※ For other fitting, please contact us.
Accessory User's manual, Written guarantee

External Dimensions
1000 Series
1000 Series
Control power supply|Product Catalog
● To control the mass flow controller, a control power supply and a signal cable are required.
● It is a control power supply unit that controls the mass flow controller.
● Can be used with AC85-260V.
● Setting signals and output signals can be displayed by switching the switches.
There are 2 types of panel mount type and floor stand type.
■Which type would you like?■
【PA01PS (panel mount type)】
【PA01S (floor stand type)】
■Scaling display (Set as full scale)
PA01 Catalog
◀ [PA01 Series] Catarog Download.
Signal cable
Signal cable Signal cable connecting mass flow controller and control power supply.
① SC01 : 1m
② SC02 : 2m
③ SC03 : 3m
Other than the above, please contact us.
contact us