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Mass Flow Controller

1000 Series

FCON
1000 Series
Features

● It is an analog model specializing the basic functions of the mass flow controller.
● Improved performance and reliability by basic functions pursuing original technology.
● newWe have added a new dedicated control power supply [PA02] equipped with new functions to our lineup.
● Compact size.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal ： Analog (0～5VDC)
● To control the mass flow controller, a control power supply and a signal cable are required.
※ Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
※ 1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Please contact us for details such as available gas types and flow rates.

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Product Catalog
1000 Series Catalog
 ◀ ［1000 Series］ Catalog Download.
Specification
Mass Flow Controller N.O C1005 C1020 C1030/C1050 C1100
Mass Flow Controller N.C C1005NC [under development]
C1020NC		 [under development]
C1030NC/C1050NC		 -
Mass Flow Meter M1005 M1020 M1030/M1050 -
Flow range (N2equivalent) 10,20,30,50,100,200,300,500SCCM
1,2,3,5SLM		 10,20SLM 30,50SLM 100SLM
Gases Various Gases (Please consult about corrosive gas) Air, N2, Ar, H2, CO2, O2, He Air, N2
Valve type NO : Normally Open, NC : Normally Close (Excluding Mass Flow Meter)
Flow rate control range 5-100％ F.S (Excluding Mass Flow Meter)
Accuracy ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃) ※Please contact us for details.
Setting signal 0.25-5VDC (excluding Mass Flow Meter)
Output signal 0-5VDC
Repeatability ±0.2％ F.S ±0.5％ F.S
Response ≦6sec ≦10sec ≦15sec
Operating differential pressure 50-300KPa 200-300KPa
Pressure resistance 1MPa(G)
Operating temperature 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity 1×10-7Pa･m3/sec He
Mounting attitude Free
Drive power source +15VDC：60mA、-15VDC：150mA
Communication Analog : 0-5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal (excluding Mass Flow Meter)
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings, 　※ For other fitting, please contact us.
Accessory User's manual, Written guarantee

External Dimensions
1000 Series
Ordering
1000 Series
　
new Control power supply [PA02]
PA02

■Easy operation.
■newSettings/outputs displayed simultaneously in two rows.
■Panel mount and stationary compatible.
■newSupports a wide range of units: %, mV, SCCM, SLM, mL/min, L/min.
■newEquipped with an accumulation function and an abnormal flow rate alarm function.
■Mass flow controller power supply : ±15VDC
■Input/output : Analog (0 to 5V) signal.
■newExternal input/output: Possible via rear terminal.
●［PA02］Go to Details page
Signal cable (sold separately)
Signal cable Signal cable connecting mass flow controller and control power supply.
【standard】
① SC01 : 1m
② SC02 : 2m
③ SC03 : 3m
Other than the above, please contact us.
contact us