Model | CUBEGM-X Series |
---|---|
Size | CUBEGM-Xα2 : W350×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank CUBEGM-Xα3 : W430×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank CUBEGM-Xα4 : W510×D400×H1100(mm) ※Except protrusion / In the case of 10 L tank |
Input power | AC100-240V |
Current consumption | About 125VA ※In the case of 3 mass flow controllers equipped with |
Flow rate control range | 1 LINE : F.S.10SCCM~20SLM (However, the mixed gas flow rate must be less than 50 SLM) |
Flow rate control | MFC : C1000 Series or FCST1000L Series |
Flow rate output signals | 0-5VDC |
INLET, OUTLET Valve | Solenoid Valve |
Leak Integrity | ≦5×10-7Pa・m3/sec He |
Pressure resistance | 0.5MPa |
Wetted surface material | SUS316, PTFE, Fluoro-Rubber (FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber) |
Standard fitting | 1/4in.SWL (equivalent) ※For other fitting, please contact us. |
Operating environment | 5-50℃, 30-80%RH (Scope of accuracy guarantee : 15-35℃) |
Accessory | AC cable(2m), User's manual, Written guarantee |