Compact MFC Unit・Mass Flow Controller・Mass Flow Meter／FCON CO., LTD.
TOP＞Mass Flow Controller＞CUBE MFC Series
Compact Flow Control Unit
CUBE MFC Series
Features
● Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
● It can be used by connecting the gas fitting and power outlet.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
■ 
Simultaneous display of set and output values on a dual-level display significantly improves visibility.
■ Wide range of units and ranges: %, mV, SCCM, SLM, mL/min, L/min (adjustable in the settings screen).
■ Integrated flow rate alarm function.
■ External input: Switchable via the front switch to input from the rear terminal (0-5VDC).
● Input & Output Signal ： Analog (0～5VDC).
● Equipped with terminal for setting / output voltage on the back.
● This product is ideal for use on the desktop, space saving.
● If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
※ Upon request, Calibration certificate, Calibration report, and Traceability scheme can be prepared with additional charges.
※ 1000 series has a flow rate accuracy of ± 1% F.S. Can be supported.
Please contact us for details such as available gas types and flow rates.
※ Lineup of normally closed type (C1005NC to C1050NC).
Product Catalog
Specification
| Conpact Flow Control Unit N.O | CUBE MFC 1005/1020/1030/1050/1100 |
|---|---|
| Conpact Flow Control Unit N.C | CUBE MFC 1005NC [Under Development]1020NC/1030NC/1050NC |
| Conpact Flow Meter Unit | CUBE MFM 1005/1020/1030/1050/1100 |
| Mass Flow Controller／Meter | 1000 series |
| Gas species | Depends on MFC selected |
| Flow range (N2equivalent) | 10SCCM～100SLM |
| Gases | Various Gases (Please consult about corrosive gas) |
| Valve type | NO : Normally Open, NC : Normally Close(Excluding Mass Flow Meter) |
| Flow rate control range | 5～100％ F.S.(Excluding Mass Flow Meter) |
| Accuracy | ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃) ※Please contact us for details. |
| Setting signal | 0.25～5VDC (Excluding Mass Flow Meter) |
| Output signal | 0～5VDC / Display : Scaling display (Setting signals and output signals can be displayed by switching the switches.) |
| Repeatability | ±0.2％ F.S |
| Response | Depends on MFC selected. |
| Operating differential pressure | Depends on MFC selected. |
| Pressure resistance | 1MPa(G) |
| Operating temperature | 5-50℃(Accuracy guaranteedbetween 15～35℃), ≦85％RH(No condensation permitted) |
| Leak integrity | 1×10-7Pa･m3/sec He |
| Drive power source | 100-240VAC : ≦500mA |
| Communication | Analog : 0～5VDC |
| Wetted surface material | SUS316L, PTFE, Fluoro-Rubber |
| Seal material | Fluoro-Rubber |
| Actuator system | Thermal (Excluding Mass Flow Meter) |
| Surface treatment | Machined finish |
| Standard fitting | 1/4in.SWL (equivalent), One-touch fittings, ※ For other fitting, please contact us. |
| Accessory | Power cord, User's manual, Written guarantee |
External Dimensions
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Ordering
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